Features

· Precision Polishing Jig for accurate wafer/substrate polishing and back-thinning

· Thickness control screw fixture with a resolution of 0.005 mm to limit stock remove

· This Polishing fixture can be fit with Unipol 1202 and 1502 and any precision 12" or larger polishing machine with yoke support to achieve automatic polishing or lapping

· Super-hard tungsten alloy is weld on the bottom of the jig for polishing resistible

· Maximum sample thickness: 13mm

· Maximum travel distance: 14mm

Sample Holder Vacuum chuck

· Maximum size of a wafer or substrate is 4"

· If the thickness of the sample is greater than 0.15 mm, adopt vacuum absorption. If the thickness is less than 0.15 mm, please use wax

Digital Micrometer

· One digital micrometer is included with a resolution of +/- 1 micron for more accurate lapping.

Pressure Indicator

· One digital balance is included for measuring the fixture weight ( pressure ) 

· Weight can be adjusted by screws while measuring on the digital balance from 1g to 2000g.

Vacuum Absorption and Filter

· Require a vacuum pump with a rate > 70 L/ min.

· To protect the vacuum pump from any moisture and liquid, connect the filter between the fixture and the pump

Size

O.D: 146mm; Height: 266mm

Optional Accessories

A vacuum pump required for vacuum absorption, please order separately.