No.

Item

Specification

1

Equipment Overall Dimension

1150×1050×1750 mm

2

Chamber Dimension

644×500×500 mm

3

Chamber Volume

120 L

4

Number of Electrode Plates

10 layers

5

Loading Tray Size

505×370 mm

6

Electrode Fixing Method

Plug-in, detachable

7

Distance from Loading Tray to Electrode Plate

12.5 mm

8

Plasma RF Power Supply

13.56 MHz / 1000 W

9

Gas Flow Control

0-100 sccm MFC mass flow controller

10

Process Gases

2 channels (O₂, H₂, N₂ and other non-corrosive gases)

11

Process Gas Supply Lines

Stainless steel tubing + hoses

12

Chamber Temperature

Ambient (room temperature)

13

Working Vacuum Level

≤30 Pa

14

Vacuum Pump

Two-stage oil-sealed vane pump, 90 m³/h

15

Pneumatic Gate Valve

GDQ-J40

16

Vacuum Measurement System

Pirani vacuum gauge (10 ~ 1×10⁻⁵ Pa)

17

Vacuum Exhaust System

Connect to external exhaust system

18

Vacuum Break System

Solenoid valve + check valve + silencer

19

Evacuation Time (no load)

≤60 s

20

Vacuum Break Time

≤15 s

21

Input Gas Pressure Detection System

2-channel automatic pressure alarm

22

Compressed Air Requirement

0.6-0.8 MPa CDA

23

Main Power Supply

3-phase, 5-wire, 380V, 50Hz

24

Total Power Consumption

5 kW

25

Equipment Weight

500 kg