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Sputtering Coating Machine |
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Low vacuum |
Magnetron sputtering |
900M(Single target) |
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Plasma sputtering |
900 amd 800(Single target); SD-2000III(Three targets) |
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Thermal evaporation |
800C and 980(Carbon rope, no target head) |
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Magnetron sputtering + thermal evaporation |
900C(Single target), The other case is carbon rope |
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High vacuum |
Magnetron sputtering |
SD-650MH(DC+ DC, DC + RF, RF+ RF) |
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Thermal evaporation |
SD-100AF(Heat evaporation carbon rod, molybdenum boat, tungsten wire bar) |
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