Join TMAX, become an agent!
Sales Manager: Gia
Email: Gia@tmaxlaboratory.com
Wechat: Dingqiuna
Item No.:
TMAX-ZY-ZD02Payment:
L/C, T/T, Western Union, Credit Cards, PaypalShipping port:
Xiamen PortLead Time:
5 DaysCertificate:
CE, IOS, ROHS, SGS, UL CertificateWarranty:
Two years limited warranty with lifetime technical supportBenchtop Multi-Layer Thermal Evaporator Deposition Coating For Metals, Alloys & Dielectric Film
1. Portability & Flexibility
·Compact footprint with multi-environment adaptability (lab/office).
2. User-Centric Design
·One-touch operation with preloaded parameters (100+ metal deposition recipes).
·10" touchscreen for intuitive process control and real-time monitoring.
3. High-Performance Deposition
·4-source simultaneous evaporation (supports 99 layers of metals/alloys/polymers per run).
·Quartz crystal monitoring for nanometer-level thickness accuracy (±3% uniformity).
4.Premium Components
·All-aluminum chamber for efficient heat dissipation.
·Imported turbo-molecular pump (300L/s) ensures ≤6×10−5 Pa ultimate vacuum.
5.Low Maintenance
·Minimal training required; modular design simplifies servicing.
· Thin-film material research (metals/dielectrics)
· Optical coatings & nanoelectronics
· Thin-film sensors & MEMS devices
· Custom alloy/polymer multilayer structures
|
Component |
Details |
|
Chamber |
400×350×360mm (H), CNC-machined aluminum |
|
Vacuum System |
300L/s turbo pump + dual-stage rotary vane pump |
|
Vacuum Measurement |
Full-range gauge (atmosphere to UHV) |
|
Evaporation Sources |
4 independent thermal sources (cross-contamination-free) |
|
Power Supply |
DC power for multi-layer deposition |
|
Thickness Control |
Quartz crystal monitor + manual/auto mode switching |
|
Software |
Network-upgradable with remote parameter adjustment |
Optional:
· Co-evaporation kit for alloys
· 2" substrate heater (400°C max)
· Water-cooled rotating sample stage
· Ultimate Vacuum: ≤6×10−5 Pa (after bake-out)
· Leak Rate: ≤5.0×10−9 Pa·L/s
· Deposition Rate: ≥8 nm/min (varies by material)
· Thickness Uniformity: ≤3% (with planetary rotation)
|
Parameter |
Specification |
|
Dimensions |
600×720×1200mm (H) |
|
Weight |
85 kg |
|
Environment |
23±3°C, <60% RH |
|
Power |
AC 230V, 32A, 50Hz |
|
Cooling Water |
0.2MPa, 15–25°C, ≥8L/min (optional) |
|
Gas Supply |
99.9% N2 (optional for venting) |
· Fully automated process: Pre-programmed vacuum pumping, substrate heating, and evaporation.
· Multi-layer capability: Sequential deposition of 4 materials (up to 99 layers) with customizable thickness/time modes.
· Data export: Real-time parameter logging and remote monitoring.
· Time-saving: Eliminates complex setup with industry-leading uptime.
· Precision: Combines lab-grade vacuum performance with production-level repeatability.
· Scalability: Modular options cater to evolving research needs.
Ideal for academic labs, startups, and industrial R&D requiring rapid prototyping of advanced thin films.
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.

Previous :
TEM&SEM Manual Thermal Evaporation Evaporator Machine For Carbon, Ag, Cu DepositionNext :
Deposition Equipment For Au, Ag, Al, Metal And Perovskite Films In Solar, OLED & Semiconductor ApplicationsCategories
© Copyright: 2025 Xiamen Tmax Battery Equipments Limited All Rights Reserved.
IPv6 network supported