Large Capacity Plasma Cleaner 120L Chamber for Industrial Surface Treatment and Activation

Sales Manager: Gia

Email: Gia@tmaxlaboratory.com

Wechat: Dingqiuna

Item No.:
TMAX-KT-DL120L
Payment:
L/C, T/T, Western Union, Credit Cards, Paypal
Shipping port:
Xiamen Port
Lead Time:
5 Days
Certificate:
CE, IOS, ROHS, SGS, UL Certificate
Warranty:
Two years limited warranty with lifetime technical support

Product Details

Large Capacity Plasma Cleaner 120L Chamber for Industrial Surface Treatment and Activation

Product Introduction:

The plasma cleaning machine is a high-tech dry processing equipment that uses plasma to clean, activate, etch and modify the surface of materials. It is widely used in precision manufacturing, semiconductors, healthcare, electronics and new energy fields. It can handle various materials such as metals, plastics, rubber, glass and high-molecular materials. It enhances surface performance: not only can it clean, but also can improve the wettability, adhesion and coating adhesion of the materials. KT-DL120L Plasma Cleaning Machine

Technical Specifications:

No.	Item	Specification
1	Equipment Overall Dimension	1150×1050×1750 mm
2	Chamber Dimension	644×500×500 mm
3	Chamber Volume	120 L
4	Number of Electrode Plates	10 layers
5	Loading Tray Size	505×370 mm
6	Electrode Fixing Method	Plug-in, detachable
7	Distance from Loading Tray to Electrode Plate	12.5 mm
8	Plasma RF Power Supply	13.56 MHz / 1000 W
9	Gas Flow Control	0-100 sccm MFC mass flow controller
10	Process Gases	2 channels (O₂, H₂, N₂ and other non-corrosive gases)
11	Process Gas Supply Lines	Stainless steel tubing + hoses
12	Chamber Temperature	Ambient (room temperature)
13	Working Vacuum Level	≤30 Pa
14	Vacuum Pump	Two-stage oil-sealed vane pump, 90 m³/h
15	Pneumatic Gate Valve	GDQ-J40
16	Vacuum Measurement System	Pirani vacuum gauge (10 ~ 1×10⁻⁵ Pa)
17	Vacuum Exhaust System	Connect to external exhaust system
18	Vacuum Break System	Solenoid valve + check valve + silencer
19	Evacuation Time (no load)	≤60 s
20	Vacuum Break Time	≤15 s
21	Input Gas Pressure Detection System	2-channel automatic pressure alarm
22	Compressed Air Requirement	0.6-0.8 MPa CDA
23	Main Power Supply	3-phase, 5-wire, 380V, 50Hz
24	Total Power Consumption	5 kW
25	Equipment Weight	500 kg

1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.

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