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Home Film Coating Machine

Sputtering Coating Machine

High-Precision Multi-Target Magnetron Sputter Coating System Coater

High-Precision Multi-Target Magnetron Sputter Coating System Coater

Sales Manager: Gia

Email: Gia@tmaxlaboratory.com

Wechat: Dingqiuna


  • Item No.:

    TMAX-PC-JS11
  • Payment:

    L/C, T/T, Western Union, Credit Cards, Paypal
  • Shipping port:

    Xiamen Port
  • Lead Time:

    5 Days
  • Certificate:

    CE, IOS, ROHS, SGS, UL Certificate
  • Warranty:

    Two years limited warranty with lifetime technical support
Product Details

High-Precision Multi-Target Magnetron Sputter Coating System Coater


Model: TMAX-PC-JS11– Product Specifications


Specifications

Category Parameter Details
Vacuum Performance Ultimate Vacuum (Sputtering Chamber) ≤6.6×10⁻⁶ Pa
System Leak Rate ≤5.0×10⁻⁷ Pa·L/S
Pump-Down Time (Atmosphere → 6.6×10⁻⁴ Pa) ≤30 min
Vacuum Retention (After 12 Hours Shutdown) ≤5 Pa
Sputtering Chamber Structure Vertical, top-opening, stainless steel (argon-welded, electropolished)
Dimensions ≥Ø300 mm × 300 mm (with anti-contamination liner)
Bakeability & Sealing 100–150°C; metal gasket/fluororubber O-ring
Magnetron Sputtering Target Configuration 3 × 50 mm adjustable-angle permanent magnet targets (RF/DC/MF compatible)
Power Supply 2 × DC (≥500 W), 1 × auto-matching RF (≥500 W)
Film Uniformity ≤5% deviation
Additional Features 3 × SMC rotary shutters; magnetic material support
Substrate Stage Sample Capacity 1 × ≥100 mm diameter
Rotation Speed 0–30 RPM (adjustable)
Heating Range RT–500°C (PID-controlled, thermocouple feedback)
Gas Delivery Mass Flow Control 2 paths (100 SCCM + 20 SCCM MFCs, CF16 valves)
Auxiliary Gas Lines 2 × DN16 inlet valves
Pumping System High-Vacuum Pump Pfeiffer Hipace 700 (680 L/s) + 4 L/s rotary pump
Valves & Pipeline DN40/CC150 pneumatic valves, stainless steel bellows
Control & Safety Automation PLC + industrial PC + touchscreen (real-time monitoring/logging)
Protection Interlocks for water/power faults (overcurrent, open circuit, etc.)
Additional Components Frame Steel construction, lockable casters, removable panels
Included Accessories Chiller, silent compressor, tool kit, spare parts
Measurement Vacuum Gauge INFICON combination gauge

Key Advantages & Applications

Advantages:

  • High Precision: Ultra-high vacuum (UHV) capability ensures contamination-free thin-film deposition.
  • Flexibility: Multi-target configuration with adjustable parameters for diverse materials (including magnetic films).
  • Reliability: Robust PLC automation with fail-safe interlocks and real-time diagnostics.
  • User-Friendly: Integrated touchscreen and PC control streamline operation.

Target Applications:

  • Research & Development: Ideal for academic or industrial labs studying advanced coatings (e.g., semiconductors, optics).
  • Industrial Coating: Suitable for small-scale production of functional films (wear-resistant, conductive, or decorative layers).
  • Material Science: Supports experiments requiring controlled environments (e.g., reactive sputtering, multi-layer deposition).

Magnetron Sputter

Tmax CE

 TMAX Partner

CVD furnace


tube furnace


muffle furnace



1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.



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