Lab Vacuum Three Target Ion Sputter Coater with Gas Flow Controller

Model: SD-2000III

 

Technical Specifications

Vacuum Pump	(Oil required) Rotary Vacuum Pump
Rotary Pumping Speed	50 Hz: 8 m3/h (2.2 L/s) / 60 Hz : 9.6m3/h (2.6 L/s)
Vacuum Limit	2 Pa
Max Sputtering Current	50 mA
Working Pressure	20 Pa-8 Pa
Vacuuming Time	<5 Min ( 2 Pa )
Vacuum Measure	Measuring range from atmosphere to 2x10-2mbar
Gas Control	Gas Flow Controller
Chamber Size	φ150 * 120mm (height) Scratch Resistant Quartz Glass
Target Source	Target size  φ47mm (Au x 0.1mm, Ag*0.5mm, Cu*0.5mm) /Target source: Au, Ag, Pt, Cu
Operation Method	Instruction Manual
Weight / Size	52kg / 390mm length x 340mm wide x 370mm high
Power Supply	AC 110V 60Hz orAC 220V 50Hz
Power Consumption	< 1500W
Rotary Sample Platform	A B C Positions
Warranty	One year limited warranty with lifetime product support

1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.